Title: | Ultrasensitive high resolution diagnostic method for semiconductor nanosystems |
Type of product: | Issue of new types of products: methods, theories |
Description: | Methods provide all possibility for multiparametric diagnostic and certification, in particular monocrystal materials and also parameters of superstructures created by nanotechnology and provides their unique properties. |
Technical advantages: | Methods allow to provide control of structure parameters changes in predictable way for materials which suitable for the manufacture of devices. |
The economic benefits: | Obtaining many structure characteristic simultaneously in one cycle with high accuracy, without necessity to go abroad.
|
The impact on the environment. Environment: | No influence. |
The stage of completion: | Report on R & D (OCD)- |
Implementation: | introduced |
Intellectual Property Rights: | By treaty- |
Forms and conditions of transfer of products: | Collaborative research (ROC)- |