Title: | Ultrasensitive methods of semiconductors diagnostics |
Type of product: | Issue of new types of products: methods, theories |
Description: | Theoretical and experimental basis and equipments for realization of X-ray-ultrasonic multiparametric express diagnostic of nanosystems to obtaine the information about many types of defects at the same time. |
Technical advantages: | Allow to make adjustments to the technological processes of nano size semiconductor, optimize their parameters and provide certification of structures and devises |
The economic benefits: | There are no analogs and concurrents in Ukraine. Possibility to carry out of high precision measurements without going abroad |
The impact on the environment. Environment: | - |
The stage of completion: | Report on R & D (OCD) |
Implementation: | introduced |
Intellectual Property Rights: | By treaty |
Forms and conditions of transfer of products: | Collaborative research (ROC) |